We offer an array of reticle SMIF pods, reticle EUV pods, and purge cabinets designed to protect, store, and transport valuable lithography reticles. These cost-effective designs provide an …

Sep 1, 2024 · The 150 mm reticle SMIF pod is an advanced reticle handling system providing superior performance during storage and transport. Class 1 internal environment; Automation …

Reticle SMIF and Cassettes. We help customers increase device yields, prevent reticle haze and pellicle damage and reduce particle generation with our advanced reticle handling products.

Reticle Retainer system provides ESD path to ground and enhanced strength. Low outgassing polycarbonate reduces the number of outgassing variables. Clear PC window provides …

Proprietary design of reticle support and retainer make contact with only the reticle edge. Metal-free attachment eliminates reticle scratching. Clear shell window provides visibility to inspect …

GuardianPro reticle stockers are available in a range of heights, lengths, and storage capacities with flexible I/O and rotation options and to meet varying fab requirements. Pod storage and …

Apr 12, 2021 · The RSP200 reticle SMIF pod features 200 mm SMIF interface. Door purge interface using inert gas minimizes contamination; UV blocking material protects …

Reticle SMIF Pod RSP200( Handle&Metal Plate) Provides high-efficiency protection for the transportation and storage of 6-inch reticles between process stations. The integrated upper …

Reticle SMIF pods designed to protect, store and transport valuable lithography reticles. Entegris’ RSP-200 reticle SMIF pod provides high-reliability handling of 150 mm or 200 mm masks and …

Jul 31, 2002 · Single-Reticle Pod transports and stores 150 mm reticles. RSP-150 SMIF-POD (TM) features metal-free, gasket-sealed construction minimizing opacity, particle …